In order to maintain the stable operation of the lithography machine, it is necessary to set a cooling system inside the lithography machine. The cooling system of the lithography machine mainly includes water cooling, forced air cooling, refrigerant, hydrogen and helium and other ways, of which water cooling is the mainstream. The water cooling system inside the lithography machine passes the water through the internal radiator through the water pipe, takes away the heat when it flows through the internal high-temperature parts, and dissipates the heat through the external radiator, thus maintaining the low temperature environment inside the lithography machine and ensuring the stable operation of the lithography machine.